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Thin film silicon MEMS-based electrostatic bilayer microresonators are fabricated on glass substrates by hot-wire chemical vapor deposition with the silicon structural layer spanning the amorphous to nanocrystalline transition. Five sets of bridge and cantilever microresonators are fabricated with hydrogen dilutions of 0%, 60%, 85%, 90% and 95%. The silicon structural layers for 0% and 60% dilution...
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