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Materials Science in Semiconductor Processing > 2004 > 7 > 1-2 > 35-38
Nuclear Inst. and Methods in Physics Research, B > 2002 > 196 > 3-4 > 308-314
Materials Science in Semiconductor Processing > 2004 > 7 > 1-2 > 35-38
Nuclear Inst. and Methods in Physics Research, B > 2002 > 196 > 3-4 > 308-314