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Cu(In,Ga)Se/sub 2/ absorber layers were fabricated by three-stage co-evaporation of metal elements, the experimental parameters affecting the performance of film and devices are numerous. The effect of the substrate temperature of 1st stage was found not to be so important, and 350/spl deg/C to be the lowest optimum temperature. In the case of substrate temperatures at 2nd/3rd stage, the optimum temperature...
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