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Thin Solid Films > 2017 > 642 > C > 214-218
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 65 - 72
Journal of Coatings Technology and Research > 2008 > 5 > 4 > 419-430
Thin Solid Films > 2017 > 642 > C > 214-218
Journal of Microelectromechanical Systems > 2011 > 20 > 1 > 65 - 72
Journal of Coatings Technology and Research > 2008 > 5 > 4 > 419-430