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This paper presents design and simulation of CMOS circuits intended for on-chip differential-mode charge based capacitance measurements in the femto-farad range. The circuits can be integrated with MEMS sensors in CMOS-compatible technology. The reported circuits are characterized by very high sensitivity and a linear C-V response. The performance of differential CBCM circuits using simple current...
Capacitance to digital conversion is often used for biosensor readout circuits based on charge sensitive amplifier Front Ends. Absolute capacitance can be measured by the time it takes to discharge a capacitance through a current source. Higher precision is obtained, if the difference between the unknown capacitance and a reference one is estimated but this is difficult to be achieved if the range...
The voltage coefficient of low voltage capacitor is the most important fact that affects the accuracy degree of capacitance value of capacitor. Its value and feature must be measured out when it used in the high accuracy situation. This paper presents an absolute double voltage measure method that gets the absolute voltage coefficient curve from 0 V to 1000 V needs only 5-step measurement. And proposed...
This paper describes the first results of an experiment aiming to determine the frequency dependence of a cryogenic vacuum-gap capacitor between 0.01 Hz (‘DC’) and 1 kHz (AC). The AC-‘DC’ difference of the vacuum-gap capacitor is measured as a function of temperature, and the measured change of around 23 µF/F between 273 K and 4 K agrees well with an extrapolation of earlier measurements on the same...
This paper describes improvement of high-value capacitance measurement method based on the sampling technology and the inductive shunt. The method can measure capacitance from 10µF to 1mF, frequency from 100 Hz to 1 kHz.
This paper presents a low-power high-resolution CMOS interface for capacitive sensors. The circuit is based on the use of a switched-capacitor charge amplifier, which converts the input capacitance to a voltage, which modulates the period of a relaxation oscillator. Auto-calibration is used to eliminate the undesired effects of transfer-parameter drift. The interface is suited for capacitive sensors...
In this paper the voltage division over the interrupter units of a high voltage circuit breaker without grading capacitors is investigated. A method of measuring capacitances and earth capacitances is presented. High voltage tests were made.
Several control strategies have been proposed to deal with the problems of UPS feeding nonlinear loads. To ensure stability and fast response, current components on the LC filter are often used as control variables. Theses currents can be very noisy and unacceptable to work as an stabilization schema. A procedure to deal with measurement problem is developed and shown to be effective. Both simulations...
This paper discusses application of direct charge measurement (DCM) on characterizing on-chip interconnect capacitance. Measurement equipment and techniques are leveraged from Flat Panel Display testing. On-chip active device is not an essential necessity for DCM test structure and it is easy to implement parallel measurements. Femto-Farad measurement sensitivity is achieved without having on-chip...
Polarities of plasma charging damage in n- and p-channel MOSFETs with Hf-based high-k gate stack (HfAlOx/SiO2) were studied for two different plasma sources (Ar-and Cl-based gas mixtures), and found to depend on plasma conditions, in contrast to those with conventional SiO2. For Ar-plasma, which was confirmed to induce a larger charging damage, both n- and p-ch MOSFETs with high-k gate stacks suffer...
In the development of metallized film power capacitors, accelerated aging experiments are carried out in order to predict the lifetime of a capacitor under nominal operating conditions. For metallized film capacitors the decrease of capacitance with time is very small even in accelerated aging. Consequently, these experiments require extremely precise measurement methods for the capacitance. We have...
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