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Plasma-exposed Si surface related to Si recess in source/drain region was investigated in detail for various superposed bias configurations with frequencies of 13.56 MHz and 400 kHz. Two different bias powers were utilized by an inductively coupled plasma reactor (ICP). The surface layer (SL) and the interfacial layer between the SL and Si substrate (IL) were analyzed by spectroscopic ellipsometry...
We demonstrate a ldquotrading time for signalrdquo approach for the measurement of species-specific optical transmission, in ambients rich in particulates, using the example case of a turbulent fluidized bed reactor. The method is introduced on the basis of Monte Carlo simulations, as well as analysis of experimental data, of beam propagation for a range of path lengths, and particle concentrations...
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