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Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 441 - 450
IEEE Transactions on Components, Packaging and Manufacturing Technology > 2011 > 1 > 6 > 825 - 832
Journal of Microelectromechanical Systems > 2011 > 20 > 2 > 441 - 450
IEEE Transactions on Components, Packaging and Manufacturing Technology > 2011 > 1 > 6 > 825 - 832