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Advances in micromachining technology can facilitate the integration of SAW (Surface Acoustic Wave) devices and CMOS circuitry on IC scale substrate for Monolithic fabrication. The optimal design and performance of these filters can be reached by using new Smart materials. The key component in the structure of the SAW device is the piezoelectric materials used which depends mainly on some important...
Plasma-exposed Si surface related to Si recess in source/drain region was investigated in detail for various superposed bias configurations with frequencies of 13.56 MHz and 400 kHz. Two different bias powers were utilized by an inductively coupled plasma reactor (ICP). The surface layer (SL) and the interfacial layer between the SL and Si substrate (IL) were analyzed by spectroscopic ellipsometry...
This paper compares the performance of a linear pulse motor (LPM) and a linear electromagnetic solenoid (LES) when used in a totally artificial heart. Our experiences with LPM-driven total artifilcial hearts have shown that the following problems need to be resolved: 1) long-term reliability of the linear bearings; 2) low thrust of the LPM. These problems concerning the LPM may be solved by using...
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