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The structural evolutions of a-C:H thin films prepared by r.f. plasma-enhanced chemical vapor deposition from a CH 4 /Ar or CH 4 /He gas mixture have been investigated. Elastic recoil detection analysis, infrared and Raman spectroscopies have been used to quantify, respectively, hydrogen content, the bonding and sp 2 proportion carbon of thin films. The variations of electron...
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