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Crystalline silicon solar cells with passivating contacts based on doped poly‐Si exhibit high optical parasitic losses. Aiming at minimizing these losses, we developed the oxygen‐alloyed poly‐Si (poly‐SiOx) as suitable material for passivating contacts. From passivation point of view, poly‐SiOx layers show excellent passivation quality and carrier selectivity for both n‐type (iVOC,flat = 740 mV, contact...