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The influence of converse piezoelectric effect on the frequency of PZT cathode during the electron emission process was studied. The PZT cathodes were prepared by ordinary ceramic process and the diameter of PZT cathode is 25 mm as well as the thickness is 3 mm. The back electrode, whose diameter is 20 mm, and the grid electrodes, with intervals being 200 mum, were made of gold by using evaporation...
This paper presents the fabrication and characterization of phased array imaging suitable capacitive micromachined ultrasonic transducers realized using a novel wafer bonding process where both the insulation layer and the membrane are user deposited silicon nitride. Two types of one-dimensional arrays were fabricated. A 128times1 element array has a resonant frequency of 15 MHz and in immersion has...
The small sizes of the MEMS or NEMS electromechanical resonators and their single wafer, multi frequencies possibilities has focused tremendous interest in the development of demonstrators using standard CMOS process. But sizes reduction induces output signal detection challenge. This paper deals with the dynamic characterization of NEMS. Heterodyne interferometric measurements are performed on beam...
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