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IEEE Transactions on Semiconductor Manufacturing > 2008 > 21 > 4 > 573 - 577
Microelectronic Engineering > 2007 > 84 > 11 > 2663-2668
Journal of Electronic Materials > 2002 > 31 > 10 > 1052-1058
IEEE Transactions on Semiconductor Manufacturing > 2008 > 21 > 4 > 573 - 577
Microelectronic Engineering > 2007 > 84 > 11 > 2663-2668
Journal of Electronic Materials > 2002 > 31 > 10 > 1052-1058