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We describe the production, characterization and performance of magnetron-sputtered Be coatings on aluminum, copper and stainless steel substrates. The coating thickness is typically 300nm. Small samples were characterized by means of Optical Microscopy (OM), Atomic Force Microscopy (AFM) and X-ray induced Photoelectron Spectroscopy (XPS) and Elastic Recoil Detection Analysis (ERDA). The coating quality...
This study demonstrates how to gain a fundamental understanding of semiconductor unit processes using surface sensitive analysis techniques. Silicide processes are presently widely-used in power transistor technology. Therefore, the platinum silicide formation has been examined systematically. Besides this technological aspect it is also shown that X-ray induced photoelectron spectroscopy (XPS) in...
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