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We present design, fabrication, and characteristics of two-dimensional micro-machined comb-drive scanner to operate in vacuum. The scanner can be actuated in two orthogonal axes using the slanted electrostatic comb-drive and silicon conductive V-shaped torsion hinges fabricated from a silicon-on-insulator wafer. The resonant frequencies of the inner mirror and the gimbal frame are 40kHz and 162Hz,...