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Environmental Monitoring and Assessment > 2012 > 184 > 6 > 3775-3787
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 3 > 391 - 398
Environmental Monitoring and Assessment > 2012 > 184 > 6 > 3775-3787
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 3 > 391 - 398