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Microelectronic Engineering > 2016 > 164 > C > 115-122
IEEE Transactions on Semiconductor Manufacturing > 2011 > 24 > 2 > 173 - 181
Microelectronic Engineering > 2016 > 164 > C > 115-122
IEEE Transactions on Semiconductor Manufacturing > 2011 > 24 > 2 > 173 - 181