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This paper reports a design and realization method for the high dynamic silicon micromachined gyroscope. The gyroscope is used in control technology field to measure pose of a rotating carrier with high self-rolling velocity up to 14400deg/s. The roll angular velocity, the yawing and pitching angle velocity of the rotating carrier are sensed and outputted by the gyroscope, and the output signal of...
A reflector-type lightwave antenna with multi-stepped structure and small aperture using MEMS technology has been fabricated and measured as a communication antenna. The radiation pattern at far field of the fabricated antenna has measured by Fourier transform method. The half power beam width is narrower than the calculated result. The side lobe levels are little higher than the calculated. The gain...
High-performance antennas at lightwave frequency require optimal curved surfaces and high mechanical precision in order to realize high aperture efficiencies. We have developed a novel micro lightwave antenna by employing the micro electromechanical system processing technology. We describe a transparent antenna that has a multilevel step structure with a diameter of 4 millimeters. The ideal curve...
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