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ToF-SIMS was used for defect and failure analysis on full wafers using KLA/Tencor maps for addressing selected defects for analysis. In the first case study, analysis of surface contamination is discussed. The analysis was performed in microscan mode for single particle analysis or in macroscan mode for large area analysis. In a second example, ToF-SIMS was used to identify particle type metallic...
We present the results of the first experiment to survey the temporal evolution of the deformation affecting very large areas using the small baseline subset (SBAS) differential synthetic aperture radar interferometry (DInSAR) algorithm. In particular, we have analyzed a set of 264 descending European Remote Sensing (ERS) SAR data frames from 1992 to 2000; these data are relevant to an area in central...
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