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Journal of Electronic Materials > 2015 > 44 > 9 > 3007-3012
IEEE Transactions on Semiconductor Manufacturing > 2008 > 21 > 3 > 399 - 412
Microelectronic Engineering > 2003 > 66 > 1-4 > 463-471
Microelectronic Engineering > 2003 > 66 > 1-4 > 472-479