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In micro-ultrasonic machining (MUSM), a major part of the material is removed by the impact of abrasive particles. In the early stage of machining, abrasive particles are distributed uniformly in the machining area. However, as the process goes on, abrasive particles will be driven out of the machining area owing to the ultrasonic vibration of the micro-tool or work-piece and the rotation of the micro-tool...