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The surface morphology of monocrystalline Ge and Si samples irradiated by the fundamental, second and forth harmonic of a pulsed Nd:YAG laser at fluences typically used for laser ablation has been investigated by scanning electron microscopy. Whenever the samples were irradiated by the 1064 nm radiation, which is poorly absorbed by the solid targets, round-shaped micrometer-sized cavities were found...
High purity single-crystal silicon was ablated with nitrogen laser radiation wavelength 337 nm, pulse length 6 ns, maximal energy density 1.1 J/cm 2 , nonuniform target energy distribution. Many droplets were observed around the damaged target area, which seem to be ejected out of it and splashed vigorously onto the surrounding target surface. Their diameters are found to be in the range of...
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