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In order to restrain surface breakdown of dielectric window in HPM (High Power Microwave) devices, experimental research of surface breakdown suppression technology for PTFE is performed under an S-band HPM experimental system in this paper. Different suppression technologies are employed, such as surface polishing, surface notching and surface coating technologies, etc. Experimental results show...
A trade-off property of CuSiN between EM improvement and line resistance increase was resolved by a breakthrough that leaves oxygen at grain boundary of Cu line surface before CuSiN formation. Then, the combination of CuSiN and Ti-rich TiN (Ti(N)) barrier metal (-BM) was applied. Oxygen left by weakening process strength of CuOx reduction lowered line resistance, because Si diffusion causing line...
A planar edge termination technique of trenched field limiting ring is investigated by using 2-dimensional numerical analysis and simulation. The better voltage blocking capability and reliability can be obtained by trenching the field-limiting ring site which would be implanted. The trench etch step makes the junction depth deeper so that junction curvature effect and surface breakdown are less happened...
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