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IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 1 > 154 - 163
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 1 > 164 - 174
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 1 > 154 - 163
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 1 > 164 - 174