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IEEE Transactions on Components, Packaging and Manufacturing Technology > 2011 > 1 > 6 > 841 - 851
Journal of Microelectromechanical Systems > 2010 > 19 > 1 > 110 - 119
IEEE Transactions on Components, Packaging and Manufacturing Technology > 2011 > 1 > 6 > 841 - 851
Journal of Microelectromechanical Systems > 2010 > 19 > 1 > 110 - 119