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Nanodiamond with dielectric strength greater than 2MV/cm was grown by microwave plasma enhanced chemical vapor deposition and used as a leaky dielectric film for RF MEMS capacitive switches. Nanodiamond films grown by MPECVD were compared with Si3N4 films deposited by RFPECVD by means of transient current measurements. Nanodiamond was characterized by SEM, AFM and Raman spectroscopy for correlation...
AFM, Raman spectroscopy, FTIR spectroscopy and Hall effect measurements were used to analyze nanocrystalline diamond film. The surface structure and conductivity as well as CH stretching bonds of the film was demonstrated.
Boron-doped nanodiamond (NCD) films were synthesized on silicon substrates by microwave plasma chemical vapor deposition (MPCVD) technique. The effect of vacuum annealing on the field emission characteristics of NCD films has been investigated. The surface morphology and quality of films was characterized by scanning electron microscope (SEM) and Raman spectroscopy. The SEM images clearly reveal formation...
Nanodiamond (ND) particles (4-8-nm) have been deposited by an electrophoretic method on aluminium alloy A319 to obtain thick (20-60-m), strongly adherent coatings. The electrophoresis deposition process was carried out by dispersing ND powders in an electrolytic solution of nickel sulphate/nickel chloride solution to obtain Ni-ND composite coating and also in isopropanol to obtain Ni-free ND coating...
Polycrystalline diamond films have unique properties for applications in advanced electronic devices. Undoped and doped polycrystalline diamond films are deposited on p type Si (100) and n type SiC (6H) substrates at the low surface deposition temperatures of 370deg - 530degC using a microwave plasma enhanced chemical vapor deposition (MPECVD) system in which the surface temperatures during deposition...
In this paper, nanodiamonds embedded diamond-like carbon films were fabricated. Nanodiamonds were dispersed onto silicon wafer by dielectrophoresis technique while the DLC films were deposited using magnetic filtered cathodic vacuum arc (MFCVA) technique. Surface inhomogeneity of morphology, contact potential and resistance of the films were studied by using scanning electron microscopy, Raman spectroscopy,...
Hydrogenated and oxygenated nano-crystalline boron-doped diamond (BDD) films were prepared by hydrogen-plasma treatment and boiling in the strong acids, respectively. Surface characteristics of the two diamond films have been investigated by scanning electron microscopy (SEM) and Raman spectroscopy. In order to clarify detailed electronic structures of surface-treated nano-crystalline diamond films,...
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