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Polycrystalline silicon still guarantees its application on solar cells as important market product until year 2050. Due to the increase of photovoltaic industry needing, technologies to produce low cost silicon will be needed. The metallurgical grade silicon (Si-GM) has been used to produce Si substrates by the atmospheric plasma thermal spray (APTS) which has the advantages of a low cost and fast...
This paper characterizes the die strength of 40 mum silicon die with the intention to understand the behavior of the thin die to prevent die crack during package assembly. Die strength is measured by three-point bending test conducted using the universal tensile tester and the three-point bending jig. At first, a comparison of the influence between mechanical and laser dicing method to the die strength...
This paper reports on the production of carbon coatings onto a silicon substrate, using a lower power radiofrequency (RF) generator, combined with a plasma immersion ion implantation (PHI) driver. An RF, 13.6 MHz, generator operating at 30 W, was used to produce plasmas using a mix of C2H2 and H2 as feeding gas. In the experiments, a mirror polished silicon (100) substrate is exposed to the RF plasma...
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