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Solid-phase crystallization (SPC) of Si thin films on glass deposited by electron-beam evaporation is compared at different annealing temperatures. Four independent film characterization methods, optical transmission microscopy, Raman and UV reflectance spectroscopy (UV-R), and X-ray diffraction (XRD), reveal that 1.4 micron thick films with n+/p-/p+ solar cell structures have the incubation times...
We have been developing original technologies for Localized Plasma Confinement (LPC) CVD method. LPC-CVD method achieves both a high deposition rate and a high conversion efficiency. From the results of IR analysis and Raman spectroscopy for μc-Si i-layer thin films, it was suggested that the combination of high stretching mode fractions in IR spectra and Raman crystallinity may have a correlation...
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