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With the use of X-ray Standing Waves (XSW) and Atomic Force Microscopy (AFM), we have studied the structure and morphology of CaF 2 films (thickness range 3-15 9) grown on Si(111) before and after modification by electron irradiation. The Ca monolayer of the as-grown CaF 2 monolayer relaxes towards the Si substrate. The F bilayer embedding the Ca monolayer has bulk spacing. Low Energy...
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