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Waveguide component technology at terahertz frequencies has come of age in recent years. Essential components such as ortho-mode transducers (OMT), quadrature hybrids, filters, and others for high performance system development were either impossible to build or too difficult to fabricate with traditional machining techniques. With micromachining of silicon wafers coated with sputtered gold it is...
We present a fabrication process for free-standing, nanoperforated membranes which are made of single-crystalline silicon. The membranes are fabricated out of silicon-on-insulator wafers. The mask for nanoperforations is patterned on the device layer side of the wafer using nanoimprint lithography. The membrane is released by etching through the handle wafer and the buried oxide layer from the backside...
The behavior of {111}-textured Pb(Zr0.53Ti0.47)O3 (PZT) deposited by the sol-gel technique in thin film bulk acoustic resonators (TFBAR's) was investigated at a resonance frequency of about 1 GHz. The resonators were fabricated on Si wafers using deep silicon etching to create a membrane structure and using platinum as top and bottom electrodes. The best response of the resonators was observed at...
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