The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
The paper describes a conceptual platform development, including design, simulation and manufacture in nanoporous biomedical and chemical sensor applications. We exploit anodic aluminum oxidation (AAO) technology to produce an excellent nanoporous surface for fast gas detection, and combine with micro-electromechanical systems (MEMS) process to implement micro-sized devices with low power consumption...
A control system to regulate the temperature of the micro hotplate in a MEMS gas sensor is presented. The controlelement, called micro hotplate, is comprised of a micro heater and a temperature sensor, both made with polysilicon, located near each other. This material has a Temperature Coefficient of Resistance (TCR) that is the basis for the design of the temperature controller of the gas sensor...
Micro-electro-mechanical-systems (MEMS) have designs which incorporate freestanding structures. These freestanding structures must be attached to the substrate during fabrication, and released when they are to be utilized. Tethers are long thin beams that mechanically anchor the freestanding structure to the substrate. In our study, we focused on the fuse-tether design and its associated Joule heating...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.