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An optical fiber interferometer using nanocrystalline boron‐doped diamond film is investigated. The diamond films are deposited on glass plates using a Microwave Plasma‐Enhanced Chemical Vapor Deposition (µPE CVD) system. The growth time is 3 h, with boron doping level of 10 000 ppm producing films (B‐NCD‐10) of thickness ≈200 nm. The presence of boron atoms in the diamond film is evident in Raman...
Design, simulation, fabrication and testing of p-type polycrystalline diamond (poly-C) piezoresistive RFMEMS is reported for the first time. The use piezoresistive detection in RFMEMS can lead to an output impedance in the ranges of 20 - 500 Omega and several MOmega for intra- and inter-grain piezoresistors, respectively. The inter-grain gauge factor of the poly-C film with a resistivity of 22 Omega...
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