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In this paper amorphous ZrO 2 and HfO 2 thin films were obtained by direct UV irradiation of Zr(IV) and Hf(IV) β-diketonate precursor complexes on Si(100) and fused silica substrates. The precursors, Zr(CH 3 COCHCOCH 3 ) 4 and Hf(C 6 H 5 COCHCOCH 3 ) 4 were deposited as amorphous thin films by spin coating. The photochemistry...
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