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Single-turn spiral inductors with magnetic material to enhance inductance are fabricated. Using double-layered Permalloy dots above and below the inductor metal, inductance improves and remains constant beyond 10 GHz with a Q factor around 11 and a peak frequency around 9 GHz. By employing single-turn small-sized inductors, the self-resonance frequency of the inductors is shifted to very high frequencies...
In this paper, die-to-die vertical coupling between clock tree and spiral inductor in three-dimension (3-D) IC is analyzed, and equivalent circuit model for analysis of vertical coupling mechanism is proposed. Analysis and modeling are verified by measurement results of a designed and fabricated test vehicle. The test vehicle has two stacked dies with clock tree or a spiral inductor.
Design of a CMOS spiral inductor of significantly reduced coupling to the adjacent inductor is presented. The synthetic quasi-TEM transmission line (TL), or the so-called complementary-conducting-strip transmission line (CCS TL), is applied to realize the proposed inductor and simultaneously shield electromagnetic coupling from the adjacent inductor by the existing meshed ground plane of the CCS TL...
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