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Any film which is deposited during the fabrication undergoes some form of stress. It can be either a compressive stress or tensile stress. It is important to have right value of either compressive or tensile stress for the particular application. In this paper we present an investigation of the stresses generated by the gold thin film during the fabrication process of RF MEMS switches. During the...
Piezoelectric AlN films with strong (002) crystal orientation are widely used in various resonator-based applications such as BAW and FBAR filters, oscillators and resonating sensors. Low intrinsic stress is one of the important requirements for the thin film stacks employed in electro-acoustic devices. In this paper, we describe technical and technological solutions enabling effective stress control...
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