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Thin Solid Films > 2011 > 519 > 7 > 2235-2240
Journal of Microelectromechanical Systems > 2009 > 18 > 1 > 97 - 102
Thin Solid Films > 2004 > 460 > 1-2 > 7-16
Thin Solid Films > 2011 > 519 > 7 > 2235-2240
Journal of Microelectromechanical Systems > 2009 > 18 > 1 > 97 - 102
Thin Solid Films > 2004 > 460 > 1-2 > 7-16