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Journal of Microelectromechanical Systems > 2009 > 18 > 1 > 97 - 102
Journal of Microelectromechanical Systems > 2008 > 17 > 5 > 1114 - 1119
Journal of Microelectromechanical Systems > 2009 > 18 > 1 > 97 - 102
Journal of Microelectromechanical Systems > 2008 > 17 > 5 > 1114 - 1119