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A uniform, smooth and crack-free multilayer silica aerogel film as thick as 5 µm is successfully coated on top of a silicon wafer. The multilayer spin-coated aerogel film was made possible by using the present authors' recently developed novel state-of-the-art aerogel processing technique. The utilisation of the thick aerogel film for the thermal insulation of a microhotplate (µHP) is studied. The...
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