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With device scaling, the introduction of emerging materials including nanowires and nanodots is required more than ever. We present several examples of making nanomaterials based on advanced thin film deposition techniques including atomic layer deposition, supercritical fluid deposition (SCFD), and selective epitaxial growth (SEG), and nanohybrid process utilizing self-assembled nano-template. Metallic...
Self-assembled Si nanowires (SiNWs) have been synthesized and characterized as a template for surface metal silicide formation to investigate electron transport at the nanowire surface. Silicon nanowires were directly grown on silicon substrates via the solid-liquid-solid (SLS) growth process. Preliminary synthesis utilized high-temperature processing of a sputtered Au catalyst film on Si (100) and...
Self-assembled silicon nanowires were synthesized with silicon monoxide as starting materials and argon as protection gas. The growth temperature was controlled at 480degC with the pressure at 2.8 MPa. Transmission electron microscopy (TEM) showed that the diameter of the silicon nanowires distributed form 5 run to 7 nm. In the high-resolution TEM image, the crystalline silicon core with diameter...
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