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The introduction of a 39nm-gap capacitive transducer, voltage-controlled frequency tuning, and a stress relieving coupled array design has enabled a 0.09% bandwidth 223.4-MHz channel-select filter with only 2.7dB of in-band insertion loss and 50dB of out-of-channel interferer rejection. This amount of rejection is more than 23dB better than a previous capacitive-gap transduced filter design that did...
In this paper a new structure of electrostatically actuated clamped-clamped micro beam resonator is designed, modeled and simulated using aluminum as structural material to measure static to low frequency magnetic fields. The device is designed and simulated using CoventorWare simulation software to get mechanical properties using a static and dynamic displacement analysis and to get the optimum values...
In this paper we report a ~1GHz lateral extensional thin-film piezoelectric-on-substrate (TPoS) resonator with an unloaded quality factor (Q) of 6700 in air (frequency-quality factor product of 6.6??1012), a motional impedance of ~160??, and a linear thermal coefficient of frequency of -29ppm. To achieve such low impedance the 21st harmonic resonance mode of a single crystalline silicon block is excited...
A novel optical technique is proposed for the characterization of MEMS resonators. The proposed technique is based on measuring the response of the resonator (resonance frequency and quality factor) optically, which eliminates the electrical parasitic effects. The proposed technique was applied to a comb-drive resonator and the obtained results show good agreement with the standard electrical technique...
A new approach for the fabrication of large contour-mode single-crystal silicon resonators has been demonstrated without the use of SOI substrates. 24-MHz-disk resonators have been built thanks to industrial facilities dedicated to the integration of passive components on silicon. They exhibit a good compromise between the quality factor Q higher than 50000 and the motional resistance of a few kilo-ohms.
Due to material limitations of poly-Si resonators, polycrystalline diamond (poly-C) has been explored as a new MEMS resonator material. The poly-C resonators are designed, fabricated and tested using electrostatic (Michigan State University) and piezoelectric (Sandia National Laboratories) actuation methods, and the results are compared. For comparable resonator structures, although the resonance...
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