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Journal of Microelectromechanical Systems > 2014 > 23 > 3 > 600 - 609
Journal of Microelectromechanical Systems > 2008 > 17 > 2 > 483 - 493
Journal of Microelectromechanical Systems > 2014 > 23 > 3 > 600 - 609
Journal of Microelectromechanical Systems > 2008 > 17 > 2 > 483 - 493