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In this work we perform the results of study of thin amorphous carbon films (a-C) synthesized by magnetron sputtering of graphite target at direct current in argon atmosphere. Analyzing experimental data, we revealed the dependence between a-C films structure and substrate temperature. Local structure was studied by Raman spectroscopy. The position of G peak varied from 1545 cm−1 to 1570 cm−1. To...
Nanodiamond with dielectric strength greater than 2MV/cm was grown by microwave plasma enhanced chemical vapor deposition and used as a leaky dielectric film for RF MEMS capacitive switches. Nanodiamond films grown by MPECVD were compared with Si3N4 films deposited by RFPECVD by means of transient current measurements. Nanodiamond was characterized by SEM, AFM and Raman spectroscopy for correlation...
AFM, Raman spectroscopy, FTIR spectroscopy and Hall effect measurements were used to analyze nanocrystalline diamond film. The surface structure and conductivity as well as CH stretching bonds of the film was demonstrated.
Boron-doped nanodiamond (NCD) films were synthesized on silicon substrates by microwave plasma chemical vapor deposition (MPCVD) technique. The effect of vacuum annealing on the field emission characteristics of NCD films has been investigated. The surface morphology and quality of films was characterized by scanning electron microscope (SEM) and Raman spectroscopy. The SEM images clearly reveal formation...
Summary form only given: A diamond thin film has many attractive properties such as high hardness, large heat conductivity etc. Microwave plasma chemical vapor deposition (MWPCVD) is an effective method for producing a diamond thin film. However, the deposition rate of the conventional low-pressure MWPCVD is very low. Recently, the authors have succeeded to produce a diamond thin film on a Si substrate...
The paper reports the techniques that we have devised for immobilizing and allocating a single nanodiamond on the electron beam (e-beam) patterned smart substrate. The properly designed coordination markers on the semiconductor substrate and the high throughput of the confocal microscope provide us with a convenient tool to single out a nanodiamond with a size less than 100 nm and to study its optical...
Polycrystalline diamond films have unique properties for applications in advanced electronic devices. Undoped and doped polycrystalline diamond films are deposited on p type Si (100) and n type SiC (6H) substrates at the low surface deposition temperatures of 370deg - 530degC using a microwave plasma enhanced chemical vapor deposition (MPECVD) system in which the surface temperatures during deposition...
In this paper, nanodiamonds embedded diamond-like carbon films were fabricated. Nanodiamonds were dispersed onto silicon wafer by dielectrophoresis technique while the DLC films were deposited using magnetic filtered cathodic vacuum arc (MFCVA) technique. Surface inhomogeneity of morphology, contact potential and resistance of the films were studied by using scanning electron microscopy, Raman spectroscopy,...
At the end of range of MeV ions in diamond, black spots are created corresponding to the Bragg peak in the stopping power; the characteristics of which are not well understood but may have application in the micromachining of diamond, quantum state storage and diamond based photonic devices. This paper reports on the initial findings of studies to determine the physical properties of these buried...
In this paper, the field emission performances from diamond powders coated with silver has been studied. Scanning electron microscopy, X-ray diffractometry, and Raman spectroscopy were employed in order to determine the morphology, crystal orientation and quality of diamond powder coated with silver
Hydrogenated and oxygenated nano-crystalline boron-doped diamond (BDD) films were prepared by hydrogen-plasma treatment and boiling in the strong acids, respectively. Surface characteristics of the two diamond films have been investigated by scanning electron microscopy (SEM) and Raman spectroscopy. In order to clarify detailed electronic structures of surface-treated nano-crystalline diamond films,...
Summary form only given. For wide application of the CVD diamond in output windows of high-power microwave sources it is necessary to establish a CVD process for production of thick diamond films with controlled quality. Currently there are some microwave plasma CVD (MPACVD) reactors at 2.45 GHz frequency which may be used for this purpose. In our experiments polycrystalline high-quality diamond films...
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