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In this work we perform the results of study of thin amorphous carbon films (a-C) synthesized by magnetron sputtering of graphite target at direct current in argon atmosphere. Analyzing experimental data, we revealed the dependence between a-C films structure and substrate temperature. Local structure was studied by Raman spectroscopy. The position of G peak varied from 1545 cm−1 to 1570 cm−1. To...
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