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The thermal stability of PdGe on Ge(100) was investigated by scanning electron microscopy, X-ray diffraction and atom probe tomography. The initial PdGe film agglomerates when heated at high temperature (≥500°C), forming spherical islands. This degradation is highly detrimental for PdGe ohmic contact fabrication in the Ge-based nano-electronics technology. However, capping the Pd layer with W before...
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