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A process has been developed for preparing a low surface roughness copper foil by evaporation and subsequent peel-off of copper metal layers on glass slides. These 15 micron thick substrates exhibited roughness values between 1 and 2 nm root-mean-square (RMS) and 9 nm RMS over 25 μm 2 and 100 μm 2 analysis areas, respectively. The deposition and crystallization of barium strontium...
Apart from conventional parallel plate capacitors, the coplanar capacitor is another useful structure for ferroelectric film-based devices. In this work, barium strontium titanate (BST) thin film-based interdigital capacitors were prepared under different conditions. The relative permittivity of the films were extracted using a program developed based on Gevorgian's model. It is found that the annealing...
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