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Clamped-clamped beam resonators are designed and fabricated in a 0.35 mum CMOS commercial technology, using a simple one-step mask-less wet etching to release the MEMS structures. The resonator, with a 22 MHz resonance frequency shows a Q value of 227 and 4400, when measured at atmospheric pressure and vacuum, respectively. This resonator is used as the main building block for filtering application...
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