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This paper reports the design and the realization of a variable-sized MEMS-based Faraday cage, used to tune the resonant frequency of a silicon micromachined cavity resonator. The Faraday cage is defined by a 2D-array of electrostatically controllable metal cantilevers. The cantilever array effectively shields an enclosed (air) volume (forming the Faraday cage) located inside the micromachined cavity...
We report on the first-ever pristine C60 (fullerene) surface micromachined structures fabricated using an all-dry etch process. These structures are used to measure the C60 thin film MEMS electromechanical properties. These properties indicate that C60 is promising for realizing useful boundary conditions for MEMS resonators, and stiction properties for MEMS and NEMS switch applications. The clamped-clamped...
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