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A method for the reduction of defect density in GaN epilayer using nanoscale patterned sapphire substrates (NPSS) was proposed. The sapphire substrates were patterned by natural lithography and inductively coupled plasma reactive ion etching (ICP-RIE). The undoped GaN films were grown on NPSS through metal organic chemical vapor deposition. The pits density was analyzed by atomic force microscope...
Contact Guidance is an important phenomenon in the bio field. However it is complex and time-consuming to fabricate the micro/nano morphology used to guide cell growth behavior. Novel method of employing nanoimprint lithography to mass-produce nanostructures was investigated. The nanoimprint stamp consisting of uniform nanogrooves was fabricated by holographic lithography and inductively coupled plasma...
Superconducting-tunnel-junction (STJ) array detectors with an effective sensitive area of 4 mm2 were fabricated for mass spectrometry. An array detector has one hundred Nb/Al/AlOx/Al/Nb junctions with a 200 mum-square sensitive area. The junctions are quasi-horizontally arranged on a 10 mm-square chip. In the course of fabrication processes, we have found that an anomalous nanometer-step structure...
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