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Because of the everlasting promotion of micro/nanofabrication techniques, the measurement of the feature contour of micro/nanofabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument that has been frequently used in measuring of micro/nanofabricated structures. However, most conventional AFM systems use a single probe with a monotonic...
While the feature size of micro-fabricated structures is continuously diminishing, the issue of high accuracy measurement becomes increasingly significant. In recent years, Atomic Force Microscopy (AFM) has become a powerful measurement tool which has been widely used in micro- and nano-fabricated structure inspection. However, owing to the fixed tilting angle of the scanning probe in traditional...
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