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CVD and more recently ALD have become methods of choice for the deposition of new materials, to deal with the 3D nature of new devices, and to meet the requirement for atomic level thickness control. Several examples illustrate how precursor design can contribute to keeping the cost of new materials deposition in control, whether through easier facilitization thanks to better physical properties,...
Photovoltaic backsheets are an essential part of photovoltaic modules. It is imperative that the backsheet perform and be shown to be weatherable over the 25 year expected module lifetime. This paper reports on findings from a study focused on understanding the durability of the outer weatherable layers of commercial backsheets exposed in south Florida. Within one year of exposure, Non-Fluoropolymer...
The flash method for measuring thermophysical properties (TPP) has attracted wide-spread interest since it was introduced by Parker et al (1961). In an extension of this technique, we introduced a front-face flash-monitoring method (FFFMM) in which a radiative source delivering short heat pulses and an infrared detector to measure temperature excursion with time are positioned on the same side of...
The mass transport properties of four micro-environment (ME) materials were tested: polycarbonate (PC), poly(ether imide) (PEI), poly(ether ether ketone) (PEEK) and the Entegris barrier material (EBM). Permeation, diffusion and solubility coefficients of water vapor were measured at room temperature with 45% and 100% relative humidity (RH). These mass transport coefficients were used to estimate the...
In this paper, the design of a UWB antenna using a transparent AgHT-8 material is proposed for green wireless applications. Computer simulation is used for studies. For verification of the design, the proposed antenna is fabricated on an AgHT-8 film and measured. Results show that the antenna has better radiation efficiency relative to its size than the previous designs, good omni-directional radiation...
As the animated short film form of the particularity, needs to create the fine style of more artistic charm. Based on the animated short film analysis of the unique fine style, example of opera theme of animation short film “farewell my concubine”, from the fine style show, opera theme select, reference and use elements of opera,consider of innovation development the fine style should be combination...
The Internet growth has allowed unprecedent wide spread access to cultural creation including music and films, to knowledge, and to a wide range of consumers' information. At the same time, it has become a huge source of business opportunities. Along with great benefits that this access to the Internet provides, the open and free access to the Internet has encountered large opposition from both political,...
Cu and Ti films were deposited by sputtering on thermally oxidized Si wafers and then the deposited films were bonded by direct Cu-Cu thermo-compression bonding for evaluating the effect of the wet pre-treatment on the interfacial adhesion energy. The interfacial adhesion energy was evaluated as 0.29, 1.28, 1.64, 1.17, and 0.42 J/m2 by acetic acid pretreatment at 35degC for 0, 1, 5, 10, and 15 min...
Pore characteristics of SiOCH layers in fine-pitch Cu-damascene interconnects were studied using monoenergetic positron beams. Doppler broadening spectra of the annihilation radiation and lifetime spectra of positrons were measured for the samples fabricated with the line/space widths of 0.27/0.27 and 1.08/1.08 mum, respectively. From measurements of the positronium (Ps) lifetimes, the mean pore size...
Physical vapor deposited (PVD) Cu seed layers have been successfully implemented for Cu gap-fill in feature sizes for the 2x nm flash devices. By tuning the incident angle of the incoming flux of Cu ions as well as utilizing the resputtering parameter, the overhang, sidewall coverage and asymmetry can be well controlled to enable complete fill by subsequent electrochemical deposition (ECD). Chemical...
Biomaterials are compatible with neighbouring tissues while implanted in body and do not cause any undesirable reactions such as coagulation and inflammation. Metallic biomaterials have found wide spread application as orthopedic prosthesis and dental implants due to their high strength, great biocompatibility and corrosion durability. But their acceptance by the living tissues in the body is very...
As Flash memories are approaching their ultimate scaling limit, reversible resistance switching attracts considerable interest because of its potential for high density non volatile memory devices. Resistive switching phenomena have been reported in many transition metal oxide films such as TiO2 or MO. This work investigates the feasibility of emerging resistive- switching devices with NiO active...
We describe a cycling failure mode in Ge2Sb2Te5-based phase change memory, based on density difference of GST in different phases and the SET/RESET thermal operations. Voids that develop and merge with each other within GST programming volume after cycling eventually lead to cell failure. By adding suitable amount of doping material into GST, we are able to delay this void formation process and to...
Three-dimensional (3D) integrated circuits (ICs) offer considerable advantages over traditional 2D IC designs by offering increased signal speeds and lower operation power, and by combining multiple technology functions in a low-volume, stacked design. The design complexity of 3D ICs introduces an increased sensitivity of operation and reliability due to the thermomechanical interactions among their...
In this paper we present the results of a study done to compare and contrast BCB and ALX polymers in typical WLP structures fabricated at RTI. Based on initial studies of the materials vendor, Asahi Glass Corp, AGC, we have examined the processing parameter space of ALX-211, in order to develop scalable manufacturing processes for these films. We present process flow and photo property data on ALX-211,...
Carbon nanotubes (CNTs) are an attractive electrical interconnect material due to their excellent mechanical, electrical and thermal properties. Despite these advantages CNTs have not been widely adopted by industry primarily because of the difficulties associated with integrating CNTs into device electronics. In this paper we demonstrate that bundles of aligned CNTs can be extracted directly from...
Conformal coatings are widely used by the electronics industry to protect sensitive equipment from moisture and corrosion. Of these, parylene thin-film coatings have many material properties such as low dielectric and dissipation factors, high operating temperatures, excellent conformability and low moisture permeability, which make them an attractive conformal material for numerous applications....
In this study, the loading-unloading data obtained from the nono-indentation tests in combination with the peridynamic simulations are used to determine the elastic modulus and yield stress of the material. A simple search algorithm minimizing the difference between the predicted force- indentation depth and experiments leads to the determination of the material properties. Nano-indentation experiments...
We have developed a complete process module for fabricating front end of line (FEOL) through silicon vias (TSVs). In this paper we describe the integration, which relies on using thermally deposited silicon as a sacrificial material to fill the TSV during FEOL processing, followed by its removal and replacement with tungsten after FEOL processing is complete. The uniqueness of this approach follows...
The refraction index n and extinguished coefficient k of materials can be calculated from their reflection and transmittance measurements with varied wavelengths. The organic and inorganic materials used for optical recording medium materials are examined. The organic dyes show that significant optical constants vary with the laser wavelength, in comparison to the inorganic phase-change materials.
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