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Silicon is one of the most commonly used materials for functional structure of microelectromechanical system. Its application is seriously restricted by reliability problems. To study the mechanical properties of silicon microstructures, an off-chip test device is designed, mainly consisting of piezoelectric drive, force sensor and displacement sensor. Secondly, a microstructure for bending test is...
This paper considers mechanical stress and strain in a piezoresistive cantilever sensor under surface stress loading, which is the loading condition that occurs in biochemical sensing applications. Finite element simulations examine the piezoresistor sensitivity due to changes in cantilever length, width, and thickness, and piezoresistor size, location, and depth. A few unexpected results are found...
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